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MOTOROLA
Freescale Semiconductor, Inc.
SEMICONDUCTOR TECHNICAL DATA
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200 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
The MPXM2202 device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output -- directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features * Temperature Compensated Over 0C to +85C * Available in Easy-to-Use Tape & Reel * Ratiometric to Supply Voltage * Gauge Ported & Non Ported Options Application Examples * Pump/Motor Controllers * Robotics * Level Indicators * Medical Diagnostics * Pressure Switching * Barometers * Altimeters Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY 1 GND
MPXM2202 SERIES
Motorola Preferred Device
0 to 200 kPa (0 to 29 psi) 40 mV FULL SCALE SPAN (TYPICAL)
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MPAK PACKAGE
SCALE 1:1 CASE 1320
SCALE 1:1 CASE 1320A
X-ducer SENSING ELEMENT
2 4
Vout+
PIN NUMBER
1 Gnd +Vout 3 4 VS -Vout 2
Vout-
Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1).
Preferred devices are Motorola recommended choices for future use and best overall value.
REV 0
(c) Motorola, Inc. 2001
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MPXM2202 SERIES
MAXIMUM RATINGS(NOTE)
Rating Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature
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Symbol Pmax Tstg TA Value 400 -40 to +125 -40 to +125 Unit kPa C C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Offset(4) Span(3) MPXM2202D/G Series MPXM2202A Series Symbol POP VS Io VFSS Voff V/P MPXM2202D/G Series MPXM2202A Series -- -- -- -- TCVFSS TCVoff Zin Zout (10% to 90%) tR -- -- Min 0 -- -- 38.5 -1.0 -2.0 -- -0.6 -1.0 -- -- -2.0 -1.0 1000 1400 -- -- -- Typ -- 10 6.0 40 -- -- 0.2 -- -- 0.1 0.5 -- -- -- -- 1.0 20 0.5 Max 200 16 -- 41.5 1.0 2.0 -- 0.4 1.0 -- -- 2.0 1.0 2500 3000 -- -- -- Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV ms ms %VFSS
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Sensitivity Linearity(5)
Pressure Hysteresis(5) (0 to 100 kPa) Temperature Hysteresis(5) (-40C to +125C) Temperature Effect on Full Scale Span(5) Temperature Effect on Input Impedance Output Impedance Response Warm-Up Offset Stability(7) Time(6) Offset(5)
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
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LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the "best case" linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
LEAST SQUARES FIT RELATIVE VOLTAGE OUTPUT EXAGGERATED PERFORMANCE CURVE
MPXM2202 SERIES
LEAST SQUARE DEVIATION STRAIGHT LINE DEVIATION
END POINT STRAIGHT LINE FIT
OFFSET 0 50 PRESSURE (% FULLSCALE) 100
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Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2202 series at 25C. The output is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm.
40 35 OUTPUT (mVdc) 30 25 20 15 10 5 0 -5 kPa 0 PSI
VS = 10 Vdc TA = 25C P1 > P2 MAX
TYP
SPAN RANGE (TYP) MIN
25
50 7.25
75
100 14.5 PRESSURE
125
150 21.75
175
200 29
OFFSET
Figure 3. Output versus Pressure Differential
ORDERING INFORMATION
Device Type/Order No No. MPXM2202D MPXM2202DT1 MPXM2202GS MPXM2202GST1 MPXM2202A MPXM2202AT1 MPXM2202AS MPXM2202AST1 Options Non-ported Non-ported, Tape and Reel Ported Ported, Tape and Reel Non-ported Non-ported, Tape and Reel Ported Ported, Tape and Reel Case Type 1320 1320 1320A 1320A 1320 1320 1320A 1320A
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MPXM2202 SERIES
Freescale Semiconductor, Inc.
PACKAGE DIMENSIONS
2X
0.006 C A B E e
PIN 4 NOTES: 1. DIMENSIONS ARE IN INCHES. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M-1994. 3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD FLASH OR PROTRUSION. MOLD FLASH OR PROTRUSION SHALL NOT EXCEED .006" PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5 MAXIMUM. 5. DIMENSIONS "b" DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 MAXIMUM. INCHES MIN MAX .155 .165 .002 .010 .014 .018 .120 .130 .245 .255 .475 .485 .325 .335 .050 BSC .025 BSC .038 .048 0 7 STYLE 1: PIN 1. 2. 3. 4.
e/2
b1 0.004
M
PIN 1
CAB
4X
b CAB
0.004
M
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E1
B
A
D
DIM A A1 b b1 D E E1 e e/2 L
GND +Vout Vs -Vout
A 0.004 DETAIL E C
SEATING PLANE
.014
GAGE PLANE
CASE 1320-02 ISSUE A MPAK, STYLE 1
A1 L DETAIL E
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Freescale Semiconductor, Inc.
PACKAGE DIMENSIONS (CONTINUED)
MPXM2202 SERIES
2X
0.006 C A B E e e/2 A1 L DETAIL E
4X
.014
GAGE PLANE
b CAB
b1
N
M
0.004
M
Freescale Semiconductor, Inc...
0.004
CAB P
NOTES: 1. DIMENSIONS ARE IN INCHES. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M-1994. 3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD FLASH OR PROTRUSION. MOLD FLASH OR PROTRUSION SHALL NOT EXCEED .006" PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5 MAXIMUM. 5. DIMENSIONS "b" DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 MAXIMUM. INCHES MIN MAX .377 .397 .002 .010 .014 .018 .120 .130 .245 .255 .475 .485 .325 .335 .050 BSC .025 BSC .013 .023 .283 .293 .363 .373 .107 .117 .192 .202 0 7
S
A DETAIL E
0.004 E1 C
SEATING PLANE
B
A
D
DIM A A1 b b1 D E E1 e e/2 L M N P S
CASE 1320A-02 ISSUE O MPAK, STYLE 1
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MPXM2202 SERIES
Freescale Semiconductor, Inc.
NOTES
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Motorola Sensor Device Data
Freescale Semiconductor, Inc.
MPXM2202 SERIES
NOTES
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Motorola Sensor Device Data
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MPXM2202 SERIES
Freescale Semiconductor, Inc.
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Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. MOTOROLA and the logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective owners. E Motorola, Inc. 2001. How to reach us: USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1-303-675-2140 or 1-800-441-2447 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3-20-1, Minami-Azabu. Minato-ku, Tokyo 106-8573 Japan. 81-3-3440-3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852-26668334 Technical Information Center: 1-800-521-6274 HOME PAGE: http://www.motorola.com/semiconductors/
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Motorola Sensor Device Data
MPXM2202/D

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